ࡱ F> )(+,-  \p _ Ba= ='oJ.8@"1[SO1[SO1[SO1[SO1.Times New Roman1 eckўSO_GBK1 eckўSO_GBK1 eckўSO_GBK1.Times New Roman1.Times New Roman1[SO1.Times New Roman1.Times New Roman15[SO1[SO1[SO1[SO16[SO1 [SO1 [SO1h6[SO1[SO1>[SO16[SO1 [SO1[SO1[SO1?[SO1[SO1,6[SO1 [SO15[SO1.Times New Roman1.Times New Roman1.Times New Roman1.Times New Roman1.Times New Roman1.Times New Roman10Arial Unicode MS1[SO+""#,##0;""\-#,##05""#,##0;[Red]""\-#,##07""#,##0.00;""\-#,##0.00A""#,##0.00;[Red]""\-#,##0.00i*2_ ""* #,##0_ ;_ ""* \-#,##0_ ;_ ""* "-"_ ;_ @_ W))_ * #,##0_ ;_ * \-#,##0_ ;_ * "-"_ ;_ @_ y,:_ ""* #,##0.00_ ;_ ""* \-#,##0.00_ ;_ ""* "-"??_ ;_ @_ g+1_ * #,##0.00_ ;_ * \-#,##0.00_ ;_ * "-"??_ ;_ @_ /\$#,##0_);\(\$#,##0\)9\$#,##0_);[Red]\(\$#,##0\);\$#,##0.00_);\(\$#,##0.00\)E \$#,##0.00_);[Red]\(\$#,##0.00\)                  3  /   , 7   /  5 , /    0 +  *  a0 - ff7  P    * + +   /      * 6   ) P    9  ` X X X X X |@ @ |@@  |@  |@ @   x@ @   |@ @   x@ @  x@ @ |@ @ x@ @ x@ @ |@ @  | @  x@ @   x@ @   x  x@ @   x@ @  x@ @ x@ @ x@ @ x@ @ x@ @  x@ @  |@ @ 1|@ @ 1|@ @ 1|@ @ |@ @ |@ @ 1|@ @ x@ @ x@ @ x@ @ x@ @ x@ @ x@ @ x@ @ x@ @  x@ @ X x x x |@ @ x@ @  x x@ @ X X X X x@ @ X x@ @  x@ @ x@ @  x@ @ X X  x@ @  x@ @  x@ @  x  x@ @  x@ @  x@ @  x@ @  x  x  x  |@ @  x ||}A}23 }A}ef }A} }}  ̙ ??v}A}L }A}ef }A} }A}23 }A}23 }A} }A}23 }A}23 }}   }}A} }A}  e}A}!ef }A}" a}A}#ef }U}$ }A}% }}& ??? ????????? }}' ??? ????????? ???}A}( }-}) }A}*ef }-}+ }A}-L }-}/ }-}0 }A}1L }-}2 }A}323 }x}4  }A}5ef }A}6 }A}7L }-}8 }A}:? }A};L }A}<23 }A}= }A}>L }A}? }}(}H }(}I }(}J }(}K }(}R }(}S }(}T }(}U }(}V 8^ĉ!60% - :_eW[r 62460% - :_eW[r 6!20% - :_eW[r 42*20% - :_eW[r 4:_eW[r 4&):_eW[r 4 eQeQ!40% - :_eW[r 32'40% - :_eW[r 3!20% - :_eW[r 32&20% - :_eW[r 3:_eW[r 3&%:_eW[r 3!60% - :_eW[r 22$60% - :_eW[r 2!60% - :_eW[r 52060% - :_eW[r 5:_eW[r 2&!:_eW[r 2!60% - :_eW[r 12 60% - :_eW[r 1!60% - :_eW[r 42,60% - :_eW[r 4 {{:_eW[r 1&:_eW[r 1 -N-N!!20% - :_eW[r 52.20% - :_eW[r 5"}Y}Y!#20% - :_eW[r 1220% - :_eW[r 1 $Gl;`Gl;`%]]&hgUSCQ40% - :_eW[r 1240% - :_eW[r 1?cUSCQylQh TyNNfNSOX[USMO Ty Kmϑ Nnx[^/Qnx^I{~/g'YAQ]  KmϑV^ht^NQUOϑ n_~7hghQňn [1987]>yϑhW[,{110S   VnSwϑKmՋb/gxvzb WWJS_ MPE:1.5m; b_MPE 1m     rb(60^150)mm!   5uaKm_N!hQňn [1987]>yϑhW[,{115S   NI{ (0.5^100 )mm  扈_hb||^KmϑN!hQňn [1987]>yϑhW[,{119S   1 Y;R~7hgUrel=(2^10%) k=2  US;R~7hgUrel=(2^5%) k=2  !        !!$ ' ) , - . (0.093^6.3)m  s^:\0s^gh[ňn [1987]>yϑhW[,{101S   # peW[4ls^NMPE: (1+A2%)% RS:\0~ϑWW3I{      ! " , s^:\ (300^6000)mm  s^g (160100^50003000)mm        N0ĉ!hQňn [1987]>yϑhW[,{108S    MPE(0.05+L/2000)m  (0^1100)mm  hb||^k7hWW!hQňn [1987]>yϑhW[,{102S    MPE:5  n^^:(0.1^1000)mm ||^(-1^+1)mm      4ls^Nh[hVh[ňn [1987]>yϑhW[,{112S    ϑWW3I{z_IQf[MPE:0.25m  " ϑWW(0.5^100)mmz_IQf[-100^+100)m       Fh_4ls^NTag_4ls^N!hQňn [1987]>yϑhW[,{113S    MPE6%  0^1.5)mm/m   ҉^WWh[ňn [1987]>yϑhW[,{114S   MPE0.23    0^360   \҉^hgNhQňn [1987]>yϑhW[,{117S   MPE:0.163  0^70 2       NI{ϑWWhQňn [1987]>yϑhW[,{105S    NI{ (0.5^100)mm  c:yhh[NhQňn [1987]>yϑhW[,{103S   R pec~vRhh[NMPE6m c:yhꁨRh[NMPE6m hQꁨRc:yhh[NMPE3m50mmhQϑ zQ MPE2m 10mmϑ zQ      " , / 0 4 5 9 > A B G H L P  (0^50)mm  aS:\ϑwQh[ňn [1987]>yϑhW[,{104S    3I{04I{05I{     (0^500)mm  ҉^:\h[ňn [1987]>yϑhW[,{106S    ҉^WW2~   0^90  c:yhh[Nh[ňn [1987]>yϑhW[,{107S   # ϑWW: 2I{ 5uaKm_N: MPE: 0.1m xx: M1~        "  (0.5^100)mm 0.5mg^2kg    Km_ϑwQh[ňn [1987]>yϑhW[,{118S   6 ϑWW3I{ Km:gMPE:(0.5m+110-5L) KmNMPE:(1m+510-6L)      $ (0^3000)mm  ~~N04lQNh[ňn [1991]>yϑhW[,{175S    4ls^҉MPE0.23 zv҉13 4ls^Q~|~0.53        0^360  s^bs^vfhQňn [1995]>yϑhW[,{176S    s^bs^vf2I{  s^bs^vfd"150mm }lfOnhSh[ňn [1998]>yϑhW[,{187S    U=0.06m/km k=2(1mg)   -30^30)mm   idXbfnOPhKmNh[ňn [1998]>yϑhW[,{188S    MPE0.020m/km   0^30)mm    NI{ё^\~~:\hQňn [1999]>yϑhW[,{196S   (0-2000)mm SoIQr^mNhQňn [1999]>yϑhW[,{197S    MPE:(0.03m +510-7L)"   (0^40)m  KmSNh[ňn [2001]>yϑhW[,{215S   ' KmSN!hckGrU=0.3m k=2 ;hQS^WWU=0.003mm k=2       $ % (0^200)mm  ~~N4lQNh[ňnhQhV~ [2003]>yϑhW[,{217S   4ls^Q~OP]U=0.23 k=2 4ls^҉U=0.13 k=2          # 4ls^҉: 0^360 zv҉32 ePV-42 ^+42          'Yϑ z~vRhh[ňn [2010]>yϑhW[,{250S MPE9m 0^100)mm^X:\h[ňn [2010]>yϑhW[,{246S MPE(1m +510-6L)# WY{:\h[ňn [2010]>yϑhW[,{251S_ Rs|;R^:\MPE: (0.5m+110-5L) ks|;R^:\MPE: (0.6m+510-6L) _s|;R^:\MPE: 60mVQ0.20m90mVQ0.25m#  1#3 46;EHOPUX 0^3000)mmv҉:\h[ňn [2014]>yϑhW[,{267S MPE:(1+H/200)m  (0^500)mm .Rg~^h[ňn [2016]>yϑhW[,{301S$ 60mQMPE:0.2m 90mQMPE:0.25m  0^100 m ckYbhSOh[ňn [2016]>yϑhW[,{304S MPE:0.23  0^360 IQngPϑĉh[ňn [2017]>yϑhlW[,{312S5 Y:\[ MPE: (0.05m+510-7L)Q:\[ MPE: (0.22m+110-6L)#$ 1#3 4 Y:\[0^1000 mm Q:\[0.8^1000 mm  IQf[R^4YhQňn  [2017]>yϑhlW[,{313S MPE33 Ջ[{!hQňn [2017]>yϑhW[,{314S MPE(1.5m+3.310-6L)# (0^200)mm ~MOy OahV!hQňn [2017]>yϑhW[,{315SS _s|60mVQMPE 0.20m90mVQMPE 0.25mks|MPE0.310-6L mRs|MPE510-6L)m  "#+.1234:#< =>@CFGHIM#O P 0^100 m  qch:\h[ňn  [2017]>yϑhW[,{316S 3I{ MPE22   (0.5^100) mm 0^320S^h!hQňn [2017]>yϑhW[,{317S 3I{ (0.5^100) mmaj0QXeKmSN!hQňn [2017]>yϑhW[,{318SmQWˆ[^Sm^KmϑN!hQňnXf[ [2018]>yϑhlW[,{336S% [^Kmϑ MPE0.005 mm m^KmϑU=0.4 mm(k=2)  ! "" [^Kmϑ0.01^6.00 mm m^Kmϑ20^500 mm   0WboIQkbcN!hQňn 020180>yϑhcW[,{005SfkIl0Wϑh[NKmϑ] z-N_< 4ls^0WveTPWhKmϑ Nnx[^U=0.5mm k=2 _TݍyKmϑib _ Nnx[^U=0.4mm+210-6D k=2  ) *5#7 89 :& 4ls^eT0^65 WveT0^60 _Tݍy0^50 m   !"$%e7hghQňn 020180>yϑhc< W[,{006SNΘ}lf gPlQSϑKmՋ-N_ U=1.8m rb=24mm =15% hQnhQňn 020180>yϑhcW[,{007S 5~ 30^500 mm 'Y0WKmϑNhVh[ňn 020180>yϑhcW[,{008S VnSwKm~(ϑvcwhz &|[~~N4lQN~ThN4ls^vh[MO͑ Y'`0.283 0zvvh[MO͑ Y'`0.543 4ls^Q~OP]1.93  hQ^h[:WU=0.14~0.99 mm k=2wW~U=0.01~0.07 mm k=2-NW~U=2.1~22.4 mm k=20&+2678@ ABCLMOP QSY Z[\efhi jlr stu}~ " 0^360 32 0.5m^" 0^66.9km N(uKmՋYhQňn 020180>yϑhcW[,{009S fkIlfk9ϑՋ gPlQSA oIQߍ*NU=1.8+L/500 m(k=2);N(u&^U=13.0mk=2 N(u8O):\U=21.4mk=2      !() *,4 5<= >@ 0^18 m09|~!hQňn 020180>yϑhcW[,{010S+ 4ls^^U=53 k=2 eMOU=113 k=2  ݍyU=3.7mk=2       !&' (* R`4ls^10eMO҉0^360ݍy0^250km sĉh[ňn [2019]>yϑhlW[,{378S MPE0.22+L/1000 m 0.8^1000 mm JS_7hgh[ňn [2019]>yϑhlW[,{339S MPE(1+L/100)m   (0^200)mm~7hgh[ňn [2019]>yϑhlW[,{340S P(0.40^6.00)mm Wg~ϑĉh[ňn [2019]>yϑhlW[,{341S fMPEWg~sĉ10mmN N\_ YrWJS҉e"27 1\_2.5+L/200 m2[E~-N_2.5+L/200 m3ݍ0.6+L/200 mWg~sĉ2.5mm^10mm\_ YrWJS҉e"27 1\_2+L/200 m2[E~-N_2+L/200 m3ݍ0.6+L/200 mWg~^Xĉ1mmN N'Y_ YrWJS҉e"27 'Y_1.5+ L/200 m2[E~-N_1.5+ L/200 m3ݍ0.6+L/200 m  !"#' (,-/0189:> ?CDFGHKLMQ RVWYafgkrvwx{|}       Y:\[1^200 mmQ:\[2.5^220 mm   PWhKmϑ:g!hQňn  [2019]>yϑhlW[,{342S NI{NI{ 0.5^100 mm125^1000 mm   v҉:\hgN!hQňn  [2019]>yϑhlW[,{343S U=0.8mk=2  (0^500) mm pe>fKmؚN!hQňn [2019]>yϑhlW[,{344S U=1.8mk=2  (0^1000) mm  NI{ckYbhSOhQňn  [2019]>yϑhlW[,{345S 0^360  n΀~m^:\!hQňn 020200>yϑhlW[,{393S 0.5^100 mm  S_SKmϑňn!hQňn  [2019]>yϑhlW[,{358S wS:\:a!~8nhaS:\ MPE:0.04 mm  wS:\0-5 m8nhaS:\0-500 mm   NI{hQё^\~~:\h[ňn [2020]ϑhlW[,{399S! U=(3.8+5.710-3L)mk=2 vQ-NLUSMO:Nmm #    (0^1000)mmxSm^KmϑNTKmϑ:\!hQňn [2021>yϑhlW[,{407S (0^100) mm :gRf:SKm|~!hQňn [2021]>yϑhlW[,{409S U=0.6km/h k=2  (0^250)km/h }lfY^:\[hKmN!hQňn [2021]>yϑhlW[,{411S `!~ (0^30)m r0GrrĉQN!hQňn [2022]>yϑhW[,{428S MPE: 0.03mm oRyϑhlW[,{427S MPE: (1m+110-5 L)#  sQ_PWhKmϑ:g!hQňn [2022]>yϑhlW[,{426S 10^1480 mm hQth!hQňn [2022]>yϑhlW[,{425S MPE: (0.4m+1.210-6L)# (9001300700)mm nS^Kmϑĉ!hQňn [2022]>yϑhlW[,{436SU peW[_N]>fMPE: (1m+110-5L) z_IQf[60mQ MPE:0.2m60mY MPE:0.25m pe>fCSRhMPE: 0.007mm# $&0168DI (0^200) mm hbn^h!hQňn [2022]>yϑhlW[,{437STib_^X:\!hQňn [2022]>yϑhlW[,{438SN peW[_N]>fMPE: (1m+110-5L) q_PKmϑNMPE1.5m +3.310-6L pe>fCSRhMPE: 0.007mm ϑWW3I{# "#$%2#4 567<ILM eWW_Km_Nh[hVh[ňn [2022]>yϑhlW[,{439S 2I{ (0.5~100)mmW~:W!hQňn [2022]>yϑhcW[,{042S- I~ 0m<Dd"2km hyhQ]3.0mm+0.110-6D 2km<Dd"300km  # !"& ' 0^300 km hQt[*kSf|~(GNSS)OS!jbhV!hQňn [2022]>yϑhcW[,{043S eKmϑMPE0.1ns RsMPE0.78dB 100kHz^2GHzRf[ 0.05~;m^X_SRwzz hQňn [1987]>yϑhlW[,{137S 0.05~ (-0.1^250)MPa F1I{~xx~hQňn% [1987]>yϑhlW[,{134S Kmϑ Nnx[^:U=(0.006^800)mg(k=2)   1mg^500kg E2I{~lQe~xxhQňn% [1987]>yϑhlW[,{136S Qnx^I{~:E2I{~% (1^20)kg F2I{~'YxxhQňn% [1987]>yhlW[,{131S Qnx^I{~:F2I{~% (50^2000)kg NI{ё^\ϑhVhQňn [1987]>yϑhlW[,{142S (1--10000)L W,gstϑhVh[ňn [1987]>yϑhW[,{167S Urel=0.02% (k=2)&  0.001mL^10L Fd$_QQՋ:gh[ňn [1987]>yϑhlW[,{128S MPE0.1 (0^500)J ~llx^h[ňn [1987]>yϑhlW[,{127S Urel1.0%^5.7%(k=2)%  = 400^500 HV10; (700^800)HV0.5; (450^750)HV0.2; (400^500)HV0.1 #$34 ^llx^h[ňn [1987]>yϑhl< W[,{129S Urel=0.5% (k=2)%  (90^250)HB mllx^h[ňn [1987]>yϑhW[,{130S U0.8HR (k=2)  (20^100)HR 0.02~;m^X_SR(wzz)hQňn   [1995]>yϑhlW[,{178S 0.02~RhQ:ghQňn [1995]>yϑhW[,{179S) Y͑_0.01~`gFg_0.03~;mS_0.05~SR_0.03~/0.05~ "#( 1N^10MN nR{_fhhSh[ňn [1998]>yϑhlW[,{189S 0.1~ (5^99999)r/min 6RRhSh[ňn [1998]>yϑhW[,{190S4 Y`6RRR0.3~ R`6RRRMPE:3%,6RRnysMPE:2% D@w|peMPE:0.03 %+ 6RRR(0^50)kN n͑0^10000 kg  :gRfhKmN(ut(n)͑Nh[ňn   [1998]>yϑhW[,{191S Kmϑ Nnx[^:U=0.3%,k=2   n͑(0^10000)kg;t͑(0^20000)kg mSCSevh[ňn [1999]>yϑhW[,{207S 0.1~/0.3~ (0^20)MNstnmh[ňn [2000]>yϑhW[,{211SNI{ (650^2000)kg/m3#/cRSh[ňn [2001]>yϑhlW[,{216S R^chMPE:3  MOychMPE:5  / a:0.5^1000 m/s2 f:3^3000 Hz d:0.01^10 mm #  " #$%)*,-R`lQfꁨRahVh[ňn [2005]>yϑhW[,{234S Qnx^I{~:M1I{~M12I{~%  % 200kg^200t ^ꁨRahVh[ňn [2022]ϑhW[,{444S ! Qnx^I{~:E2I{~ F1I{~F2I{~M1I{~ M12I{~%   %%%%` E2I{~xx:1mg^1000g ;F1I{~xx:1mg^500kg ; F2I{~xx:50kg^2350kg ; M1I{~xx:10g^2000kg ; M12I{~xx:1~92 t ;% %&%'+01<%=AEFP%RVWX\]mbwsbP[h[ňn [2007]>yϑhlW[,{241S 0.3~ (0.14^2700)Nm N,SRhh[ňn [2010]>yϑhlW[,{259S 0.4~ 0.25~ -0.1^250 MPa _8Oh[ňn [2010]>yϑhlW[,{258S* MPE0.15% (0.3mm) MPE0.5m (d"0.3mm) 0^25 mmQyfNhVhQňnh[ňn [2010]>yϑhW[,{261S+ lMPE:(pe0.2 %)1*NW[;peMPE: (pe0.01 %)1 r % l50 ^ 30000 r/min pe0 ^ 999999 r#$ }lf6RRd~R!hQňn [2010]>yϑhW[,{252S 0.5~ (0^1000)NKmRňnhQňn [2010]>yϑhW[,{253S xxM1I{~ KbcpeW[_lh: 0.1~& lw(0-10000 Nm KbcpeW[_lh:5-99999 r/min  ! }lf`gňnhKmSh[ňn [2010]>yϑhW[,{256S (0^5000)kg }lfl҉ShS!hQňn [2010]>yϑhW[,{254S0.28 :gRfeTvlTR-lT҉Nh[ňn   [2010]>yϑhW[,{255S R0.5~ ҉^MPE:302   R(0^1000)N, ҉^0^360 4lAmϑhQňn [2012]>yϑhlW[,{263S 0.2~! S_DN(80^300)mm;AmϑV1^1200 m3/h #lRmTeT4llmQWdbYϑ|~h[ňn [2013]>yϑhW[,{265S1 Qnx^I{~xx :M1I{~ Qnx^I{~5uP[)Ys^ :II~ Qnx^I{~5uP[Sy :III~  %  ,0 1^4000 kgmbwhQňn [2013]>yϑhlW[,{266S2 `gFgR^MPE:0.03%xxRyϑhlW[,{267ShQ~ 490^830 HLD 460^630 HLG   llx^h[ňn [2014]>yϑhlW[,{265S> hQKmRN0.1~ ϑWWMPE0.006mm q_PKmϑNMPE3+L/100 mMPE0.02  #&'()013478H hQKmRN0~10 N00~50 N ϑWW2.54mm 2.46mm 1.25mm q_PKmϑN0~200 mm0~360    !'(./07<=?AFG Amϑy{Nh[ňn [2014]>yϑhW[,{268S< vAm5uSMPE:0.01;vAm5uAmMPE0.01sMPE110-5)n^MPE0.01#&',#.256;q +vAm5uSKmϑV0^5 V0^10V vAm5uAmKmϑV0^20 mA0^30 mAsKmϑV0^100 kHz;0^50 kHz )n^(-50^500) ! 5u;KmϑV0^4000   $%&()+-./124>?@CDHIJKMNRUYZaijkopNO/cRhQňn [2014]>yϑhlW[,{266S9 R^upOe^Sp16 Hz Urel=1.7 %k=2  &^Urel=2.5 %k=2  %  "&* +%.45 68 s0.5^100 Hz g'YR^2.5 m/s2 # NQ _R!hQňn [2015]>yϑhlW[,{298S U=0.5N/cm;k=2  7^70 N/cm peW[SRhQňn [2015]>yϑhW[,{297S 0.01~00.02~00.05~00.1~00.2~00.5~  (-0.1^60)MPa 961[yh[ňn [2015]>yϑhW[,{292S` )\W11^300 m3Urel=0.3%k=2 'YWĉR1300^20000 m3Urel=0.2%k=2 'YW NĉR1300^20000 m3Urel=0.4%k=2   "%&+,./ 0%389 :<=>EHINOP#QR S%V[\ ]_ 10^20000 m3  # z_ё^\P[yh[ňn [2015]>yϑhW[,{294SL #(20^100)m3Urel=0.3k=2 (100^700)m3Urel=0.2k=2 (700^20000)m3Urel=0.1k=2  # % "##$ %%(,- .0156=#>? @%CGH IK (20^20000)m3 # tb_ё^\P[yh[ňn [2015]>yϑhW[,{295S<  Urel=0.3% (k=2)  e"50m3# gS_ё^\P[yh[ňn [2015]>yϑhW[,{296S Urel=0.13% k=2   e"10m3#}lfclalgirhKm(u^vKmR:g!hQňn [2015]>yϑhW[,{300S- nR{v_MPE0.05mmmbR0.3~^0.1~nLeMPE3ms$'(,9 nR{v_0^500 mmmbR0^20000 N^0^100 km/hnLe0^150 s !"#&'+23478 ]llx^h[ňn [2016]>yϑhlW[,{305S 36^88 HBa llx^h[ňn [2016]>yϑhlW[,{306S 5^18 HW Y͑_mbwhQ:ghQňn [2017]>yϑhlW[,{311S 0.03~ 1^10000 Nm  ;``nm|irǑ7hhVh[ňn [2017]>yϑhlW[,{325SZ O:d_lSO0|\0p\Ǒ7h!hňn Nnx[^Urel=1.0%(k=2) zfؚ|^~ThQN Nnx[^Urel=1.0%(k=2) lSOAmϑh[N Qnx^I{~1.0~ %'138 9%<GNPVY 7O:d_lSO0|\0p\Ǒ7h!hňn:100^6000 ml/min5^80 L/min80^150 L/min 0.8^1.2 m3/min zfؚ|^~ThQN0^6000 ml/min10^120 L/min800^1200 L/min lSOAmϑh[N30-160 L/min900-2000 L/min400-1800 m/h"$%&().02367>?BCFGNZ[\`agiklopuwz{ f nAmϑ(W~h[ňn [2017]>yϑhlW[,{326S mMOMPE0.5mmAmϑUrel=1% k=2  %  mMO(0.1^1.5)mAmϑ0.001^93 m3/s #KmRňnh[ňn [2017]>yϑhlW[,{327S% lwMPE0.05%RyϑhlW[,{328S lw0.03~lMPE0.03%FS ) lwKmϑV1^10000 NmlKmϑV20^10000 r/min #$:gRfSR:glKmϑN!hQňn [2018]>yϑhW[,{338S MPE:0.2% KmϑV(100~10000)r/min mSwllRl:gh[ňn [2018]>yϑhcW[,{002SfkIl^^ϑa{t@bVnSwRl:gϑh[-N_ 1^25 kg/min php4lhh[ňn [2018]>yϑhcW[,{003SfkIl^ϑKmՋh[xvz @b Urel=0.2%k=2 %  " AmϑV0.03^30 m3/hS_DN15mm^DN50mm   w(uΘKmϑNhh[ňn [2018]>yϑhcW[,{004S F^ϑh[KmՋ@b (0.2^30)m/s =$_QQՋ:g!hQňn [2019]>yϑhlW[,{349S $^pe>f8nhaS:\ g'YAQ]0.03mm^~vRh g'YAQ]0.02mm^pe>fJS_KmϑN  Nnx[^U=0.0017mm k=2^wS:\ Qnx^I{~I~(ϑQnx^I{~II~4ls^^0Wv^ Nnx[^Urel=4.6% k=2lx^g'YAQ]1.5HRCe Nnx[^Urel=8.610-5 k=2hb||^ Nnx[^Urel=4% k=2'.? @IJ KM[\fhv w%z  %  %  ,^pe>f8nhaS:\ 0^200 mm^~vRh 0^10 mm^pe>fJS_KmϑN 5^700 mm^wS:\ 0^5 m (ϑ10g^64kg 4ls^^0Wv^4ls^(ϑ10g^64kg 4ls^^0Wv^4ls^Wvlx^20^70 HRC;e0^7 shb||^f^0(R^0s^0z0xx0Y0s^x   "#%34589;EFGHIKPSTXilmq/eQ_xFm:_^hKmN!hQňn [2019]>yϑhlW[,{350SC Rf8nhaS:\ g'YAQ]0.03mm  &' (*<8 Rf8nhaS:\ 0^200 mm  !#01256  F1I{~'YxxhQňn% [2019]>yϑhlW[,{351S Qnx^I{~:F1I{~% (50^500)kg  ^ޏ~/}ꁨRahVh[ňn [2019]ϑhlW[,{352S (0^100)t ޏ~/}ꁨRahVh[ňn  [2019]>yϑhlW[,{353S (0^2000)t/h ͑R_ꁨRňeahVh[ňn [2019]>yϑhlW[,{354S (0^1000)kg llx^h[ňn  [2019]>yϑhlW[,{359S 0.92^1.3 HSD  26^99 HSD mblՋ:gh[ňn [2019]>yϑhlW[,{360S mbw0.1~  l҉U=0.01k=2    mbw2^5000 Nm l҉0^360  SR_RhQ:ghQňn [2019]>yϑhlW[,{361S 0.03~/0.05~  1kN^10MN mS_RhQ:ghQňn [2019]>yϑhlW[,{362S 10^2000 kN  'YlǑ7hhVh[ňn  [2019]>yϑhlW[,{363S" 1.Urel=1.0%k=2  2.Urel=1.0%k=2    % != 1.O:d_lSO0|\0p\Ǒ7hN!hňn: 100ml/min^1200L/min 2.Amϑ!hQN0^20 L/min )*-345 |\Ǒ7hhVh[ňn  [2019]>yϑhlW[,{364S Urel=1.0%k=2 %  ( O:d_lSO0|\0p\Ǒ7hN~T!hQňn: 100ml/min^150L/min  @S(h)h[ňn [2019]>yϑhlW[,{369S 0^40 kPa eR5uP[ꁨR@Sh[ňn [2019]>yϑhlW[,{370S Y`SR0^40 kPa[(0^300)mmHg]  Vn[MON!hQňn [2019]>yϑhlW[,{356S U=32 k=2  -15o^15o ## xs^al}lfqemϑhKmN!hQňn  [2019]>yϑhlW[,{357S Urel=0.8% k=2 %  (0-400)g   zzvlSh h[ňn   '[2020] >yϑhlW[,{379S 0.01~ (100^1200)hPa.a  E2I{~KQ~xxhQňn% [2020] >yϑhlW[,{390S Kmϑ Nnx[^:U=0.010^0.25 mg k=2    (1^500)g E2I{~kKQ~xxhQňn% [2020] >yϑhlW[,{391S (1^500)m< g 0.3~KmRNhQňn [2020]>yϑhlW[,{388S 10N^120MN 0.1~KmRNhQňn [2020]lϑhlW[,{389S 1N^2000kN T[SAmϑh[ňn [2020]>yϑhlW[,{397S Urel=0.30%k=2 %  1^7000 m3/h # }lfPh[ňn [2020]>yϑhlW[,{398S g'YAQ]0.025% 50L0100L0200L0500L01000L02000L  RN!hQňn [2020]>yϑhlW[,{385S MPE0.5%e"2L 20mL2L)   0.5^8 LWih] zR`KmϑNϑhQňn [2020]>yϑhlW[,{400Sm (/cROSSpUrel=1.0%k=2  &^Urel=2.0%k=2  QQR^ Urel=3.0% k=2  5uOS MPE0.01% e Urel=0.2% k=2  %   % %& ')+,24 5%8=? @BDEINOVY] ^%afh ika /cROS10^5000)Hz QQR^ 50^10000 m/s2 5uOS 0.1Hz^200kHz e 5uOS10s^0.1s/cROS500s^0.05s "#&#'(,34;>CGKLPV[\V9_Nh[ňn [2021]>yϑhlW[,{406S; V9_Nh[ňnU=1.0HRC k=2V9_N9_Qb'|h[NU=1.0g k=28nhaS:\MPE0.05mm   !&' (*0343 V9_Nh[ňn602 HRCV9_N9_Qb'|h[N2^6 kg8nhaS:\0^500 mm   !"$+,-01 }lfR}6RRhSh[ňn [2021]>yϑhlW[,{410S< Y`6RRR0.3~R`6RRRMPE3%6RRnysMPE:2%D@w|peMPE:0.03tn ͑0.3~ $)28; 6RRR(0^50)kN tn ͑(0-20000)kg O:d_R`t͑N!hQňn [2021]ϑhlW[,{419S0 Kmϑ Nnx[^Y`!hQ :U=18kg k=2Kmϑ Nnx[^R`!hQ :U=62kg k=20   $% &+, -/ 500^50000 kg  4ll~^S[{gN!hQňn [2021]>yϑhlW[,{404S Qnx^I{~0.05~ (-10^10)kPa mQWbnN!hQňn [2021]>yϑhlW[,{401S (0^6)MPa mQWMeyh[ňn [2021]>yϑhlW[,{402Sd"4000kg mQW/eQ;RNh[ňn [2021]>yϑhlW[,{400SG hQKmRNQnx^I{~0.1~5uP[yhg'YAQ]0.05spe>f8nhaS:\g'YAQ]0.03mmY_CSR:\g'YAQ]4m !/6C( RyϑhlW[,{403S SRQnx^I{~0.05~(ϑg'YAQ]1.0g  SR0^600 kPa(ϑ0.02^64 kg   4llxdb:gh[ňn  [2021]>yϑhlW[_414S\ ^g'YAQ]0.03mmeg'YAQ] 0.05s(e10s);0.07s(e10min);0.10s(e1h)lg'YAQ]0.5% #'37EILW, ^0^200)mm e 0.01s^24h l(20^2000)r/min !"4llxAmR^Km[Nh[ňn [2021]>yϑhlW[,{415S ^g'YAQ]:0.04mmeg'YAQ] 0.05s(e10s);0.07s(e10min);0.10s(e1h)(ϑ1020 kgyϑp͑ Y'`ibU\ Nnx[^U=0.06 gk=2 2050 kgyϑp͑ Y'`ibU\ Nnx[^U=0.06 gk=2  #'37EILPQRWemnqstuz( ^(0^300)mme0.01s^24h(ϑ(0.1^64)kg !"'4llxՋSObW/c[Sh[ňn [2021]>yϑhW[,{416SZ ^Qnx^I{~1~ Nnx[^U=0.02mm,k=2eg'YAQ] 0.05s(e10s);0.07s(e10min);0.10s(e1h)  (04@DRVY( ^(0^5)m  (14.72^15.30)mme0.01s^24h $% 4llQFmdb:gh[ňn [2021]>yϑhlW[,{417S^ ^g'YAQ]0.03mm eg'YAQ] 0.05s(e10s);0.07s(e10min);0.10s(e1h)lg'YAQ]0.5% $(48FJMX]- ^0-200)mme 0.01s^24hl(20^10000)r/min !" i_lSOAmϑhQňn [2021]>yϑhlW[,{418S 0.016^160 m3/h  #hQhllSOAmϑhQňnh[ňn [2022]>yϑhlW[,{433S/ 4NLuAmeN̑U4VlAmϑhQňnUrel=0.25% k=2 i_lSOAmϑhQňn0.2~  +.C 4NLuAmeN̑U4VlAmϑhQňnAmϑV0.1^20000 m/h i_lSOAmϑhQňnAmϑV0.016^1.2 m/h$5:;>? 5uP[vAmϑh[ňn [2022]>yϑhlW[,{434S1 vAmϑhQňn: 0.5~ vlSOAmϑhQňn: 0.5~ i_lSOAmϑhQňn: 0.2~  +0o vAmϑhQňn:(0^6000)ml0(0^2500)ml0(0^1000)ml vlSOAmϑhQňn:(0^6000)ml0(0^2000)ml0(0^1000)ml i_lSOAmϑhQňn:(0.016^6)m/h !"*478?@BCJKMNVahi4lhh[ňn [2022]>yϑhlW[,{435S Urel=0.05%k=2   DN15^50 0.007^40 m/h   WXmQXPKm[Nh[ňn [2022]>yϑhlW[,{424Sh ^g'YAQ]0.03mm ҉^g'YAQ]2 (ϑQnx^~+RII eg'YAQ]:0.05s(e10s);0.07s(e10min);0.10s(e1h) "+.7?COSae8 ^0~200)mm (ϑ2~820)g ҉^ (0~320 e0.01s~24h&',/ W]Q[Nh[ňn [2022]>yϑhlW[,{429SD 5uP[)Ys^Qnx^I{~~8nhaS:\g'YAQ]0.03mm ^X:\g'YAQ]0.048mmv:\: g'YAQ]0.15mm )157= (ϑ0.1~64 kg^0~500 mm  4llQFmhQ z^NQ~eKm[Nh[ňn [2022]>yϑhlW[,{423S- ^g'YAQ]0.03mm Y_g'YAQ]:4m (ϑQnx^~+RII "+& ^0~200)mm Y_0~25)mm (ϑ2~820)g l9YyϑhlW[,{422S+ ^g'YAQ]0.03mm (ϑQnx^~+R ;R^g'YAQ]: 10m %# ^0~200)mm (ϑ2~820)g ;R^0~6 mm  ! fnRs^a:g!hQňn  [2019]>yϑhlW[,{355S U=4.3g (k=2)  (4^20) g  y_:gR^hQňn [2022]>yϑhcW[,{033SVnS*)Yb/gxvzbϑKmՋb/gxvz@b> 3^10 m/s2:U=810-4 m/s2(k=2) 10^1000 m/s2:Urel=0.008 %(k=2) #  ##  "#'(+#,- .%1: ; (3^1000) m/s2 # QQR^hQňn [2022]>yϑhcW[,{034S R^E^yϑhcW[,{040S D3^lQqQhhKm-N_ Urel=0.05%(k=2) # AmϑV0.5^300 m/h hhS_DN10^400   "hQXnh[ňn [1987]>yϑhlW[,{162S  U=0.2^1.0 dB(k=2)   50^20000 Hz 5uXhQňn [1987]>yϑhlW[,{163S  )XOS: SR:W: 10 Hz^200 Hz: U=0.5 dB(k=2); 250 Hz^400 Hz: U=0.3 dB(k=2); 1u:W: 500 Hz^1.25 kHz: U=0.3 dB(k=2); 1.6 kHz^10 kHz: U=0.5 dB(k=2); 12.5 kHz^20 kHz: U=0.9 dB(k=2); 5uOS: U=0.1 dB(k=2)  ! "-.6 7? @EHPQ[ \d eqrz {      10^20000 Hz X!hQhVh[ňn [1987]>yϑhlW[,{164S U=0.07 dB(k=2)  20^140 dBBg󗡋!hQňn [1987]>yϑhlW[,{165S  U=0.1 dB(k=2)  10 Hz^20 kHz Xc$ONh[ňn [1995]>yϑhW[,{184S  P4ls^(eW)~'`]Urel=0.1 %(k=2)pQhVpQ]kpQ12 dBeU=0.2 dB(k=2)kpQ20 dBeU=0.2 dB(k=2)kpQ60 dBeU=0.4 dB(k=2)Wv~'`]U=1.0 k=2  Q[^Urel=6.0 k=2 bPQUO:\[U=0.06 mmk=2  :wm^Kmϑ]c4Y-N_s:N3^15 MHze U=4.9 mmk=2  c4Y-N_s:N1^3 MHze U=20mmk=2)0 % &+- .6 7:>CE FN ORV[] ^f gjr sxz {} %        0.5^15 MHzPgeXf[yr'`KmϑNhV!hQňn [2016]>yϑhlW[,{308S] 8TX|peU=2.8 %(k=2)Xn3z['`U=0.1 dB/h(k=2){l{KmϑRg|~~~'`U=0.16 dBk=2 Xnv;`l1YwUrel=1.2 %k=2    # $'5 6>? @BM N%QWX Y[ 20^20000 Hz  XՋWW!hQňn  [2016]>yϑhlW[,{309S{ ::\[(0.01^1 mmU=1.5 m(k=2)1^200 mm: U=5 m(k=2)200^400 mmU=10 mk=2 (400^500 mmU=26 m k=2 0.5^10 mU=2 mmk=2      "#' (. /2478;<>? @FG HJLPQTUWX Y_`a bdgjkmnop qvw xz 0.01 mm^10 m Xf[[[Xf[yr'`!hQňn  [2016]>yϑhlW[,{310S r,g^jVXU=0.7 dBk=2 XSGWS'`U=0.3 dBk=2 hQmX[1uX:W20^630 HzU=0.7 dBk=2 800^5000 HzU=0.6 dBk=2 6.3^20 kHzU=0.8 dBk=2 JSmX[1uX:W20^630 HzU=0.9 dBk=2 800^5000 HzU=0.7 dBk=2 6.3^20 kHzU=1.0 dBk=2 mTe0.01^20 sUrel=9 %(k=2)20^30 sUrel=10 %(k=2)XϑU=1.6 dBk=2     !" #%13478:; <CD EGJMNRSUV W^_ `behiklop qxy z|       %  %     XS\hKmN!hQňn [2017]>yϑhlW[,{335S OSE^^U=0.4 dBk=2     20 kHz^2 MHz R,ThVKmՋN!hQňn [2019]>yϑhlW[,{368SQ XS~U=0.6 dBk=2 sUrel=0.1 %k=2  gHeyϑhcW[,{038S VnSyryYhhKmxvzb :wؚ^0^Sm^U=5.1 mm k=2  . s1^3 MHz 3^15 MHzS^4^400 mm 2^200)mm!"$&'( vc5Xc$ON!hQňn 020220>yϑhcW[,{039SE bP*jTQUO:\[Urel=3.2 %,k=2 bP~TQUO:\[Urel=3.4 % k=2Gbkb҉^VUrel=2.0 %,k=2 %  ! "%%+, -/7 8%;B C< bP*jTQUO:\[3.0^55.0 mm bP~TQUO:\[2.5^45.0 mm Gbkb҉^V2.5^86   #$(),478:;' XlhKmNh[ňn [2022]>yϑhlW[,{421S; Xe5uOSUrel=0.1 %(k=2)XOSUrel=0.3 %(k=2)E^e'YhVh[ňn [2022]>yϑhlW[,{430S+  ACVUrel=0.2 %k=2 sUrel =1.2x10-7k=2  %   %$#&' (*+ ACV0.01 ^10 V(0-p) s0.1 Hz^200 kHz %"# IQ5uؚ)nhQňnpf[ [1986]>yϑhlW[,{006S U=(0.8^2.4)! k=2  (800^2500)! NI{”5u;)n^hQňn [1987]>yϑhlW[,{123S U=(0.02^0.04)! (k=2)  -80^300 !  hQ4l)n^hQňn [1987]>yϑ< hlW[,{126S U=(0.02^0.04)! (k=2)  NI{”є10--”p5uvPhQňn [1987]>yϑhlW[,{124S U=0.6^0.9 ! (k=2)   (300^1100)!&^ophQňn [1987]>yϑhlW[,{125S U=(4^6)! (k2)  (800^2000)! )n^N!kNhh[ňn [2010]>yϑhlW[,{262S Qnx^0.02~ (-200^1800)! {_5u;p!hQňn [2013]>yϑhlW[,{282S U=(0.8^2.0)! k=2  300^1700 !  Sё^\)n^h[ňn [2013]>yϑhlW[,{283S U=0.15 k=2  (-40^300)! ňp5uvP!hQňn [2013]>yϑhlW[,{284S U=0.02^0.5 ! k=2   sXՋY)n^n^Spe!hQňn [2013]>yϑhlW[,{285S )n^U=0.12 ! k=2 n^U=1.6%RH k=2     )n^-50^300!n^20%RH^99%RH  tZ?QW{Q{!hQňn [2013]>yϑhlW[,{276S/ )n^MPE0.2! n^MPE3%RH jVXN~ 'llU=1.5% k=3 "% &+(, -2 )n^20^50 ! n^0^100 RH jVX30^100 dB 'll(2^40)%   !$%(+-. hb)n^!hQňn [2016]>yϑhlW[,{307S U=0.4 ! k=2 35^400!]\O(uwW5ё^\p5uvPh[ňn [2017]>yϑhlW[,{329S U=0.9! k=2  ]\O(u^ё^\p5uvP!hQňn [2017]>yϑhlW[,{330S R`)ni!hQňn  [2017]>yϑhlW[,{331S U=0.009 ! k=2  -40^400 !  pPN!hQňn  [2017]>yϑhlW[,{332S U=(0.3^2.5)! k=2  -50^800 !  )n^ShV!hQňn [2017]>yϑhlW[,{333S U=0.0060mA k=2  -30!^300! SR_)n^h[ňn [2017]>yϑhlW[,{334S U=0.15! k=2  -40!^300! ~Y3)nh[ňn [2021]>yϑhlW[,{412S U=0.03! k=2  35.0^42.0 !  r^SO_)n^!hQhV!hQňn [2022]>yϑhlW[,{440S U=0.05^0.6 ! k=2    -38^1100 !  p5uvPh[p!hQňn [2022]>yϑhlW[,{441S, tT)n^R^U=0.21^0.3 !,k=2 _T)n^R^U=0.16! k=2   ! "() * 300^1500 ! p5uvP0p5u;ꁨRKmϑ|~!hQňn [2022]>yϑhlW[,{442S U=0.05^0.68 ! k=2   -40^1100 !  )n^!hQN!hQňn [2022]>yϑhlW[,{443Sb .)n^U=0.02^0.28 !,k=25uSU=0.001^0.015 mV,k=2 5uAmU=0.0005^0.010 mA,k=25u;U=0.003^0.010 ,k=2    !"'(+ ,./03 456<=BCF GIM NOPUV[\^ _a4 )n^-200^1800 !5uS0^75 mV 5uAm4^50 mA5u;5^400   !"#%&(-./235uxf[ NI{vAm5u;hQňn [1986]>yϑhlW[,{018S (110-3^1105)# #  NI{vAm5u;hQňn [1987]>yϑhlW[,{149S (0.0001^1000000)NI{5u`lhQňn [1987]>yϑhlW[,{143S (1.018550^1.018680)V  vAmk5uehhQňn [1987]>yϑhlW[,{144S 0.002~ (0.01^100000)vAmkN_5uMO]hQňn [1987]>yϑhlW[,{145S 0.0001 ~ (-0.1111111^2.1111110)V  vAm5u;{h[ňn [1987]>yϑhlW[,{146S 0.005~vAm5uehh[ňn [1987]>yϑhlW[,{147S (0.01^10000) vAm5uMO]h[ňn [1987]>yϑhlW[,{148S (0.0000001^2.1111110)V :ylhVh[ňn [1987]>yϑhlW[,{153S$ ehhTg:MPE:0.01%; 5uS:MPE:(0.25^0.5)%Y s:0.1Hz^3.2GHz; ehhTg:0.5ns^5s; 5uS:1mV^200V(1M,1kHz); 1mV^5V(50,1kHz); DC5uS:-200V^+200V  "&':;KMST wvfSO/cahVshQňn [1987]>yϑhlW[,{156S MPE:710-9 # 0.1MHz1MHz5MHz10MHz yhh[ňn [1987]>yϑhlW[,{155S* eMPE:(110-7T+0.003)s; e]MPE:0.03s/d# e(1^99999)se]9.30s/d  Nv5uhh[ňn [1992]>yϑhlW[,{073S 3(57.7^400)V; 3(0.1^60)A hAmh[Nh[ňn [1995]>yϑhlW[,{183S 5u;:MPE:0.004%; 5uAm:MPE:0.1% (110-9 ^110-10)[/R^#  # _05uV:gh[Nh[ňn [1995]>yϑhlW[,{185S> vAm5uSMPE:0.01%; NAm5uSMPE:0.1%; \yϑhlW[,{139S7 s0eMPE:310-8; vAm5uSMPE:0.005%eQ; NAm5uSMPE:0.01%eQ##%'+5G s:0.1Hz^5GHz; e:0.5ns^10s; vAm5uS:1mV^1000V; NAm5uS:5mV^700V(20Hz^1MHz) #'(/378AB5u݋e9hVh[Nh[ňn [1999]>yϑhlW[,{199S- vf/csQnx^:110-6; vAm5uSMPE:0.1V; vAm5uAmMPE:0.1mA ##/ e:(0.1^2000)s; vAm5uS:(0^100)V; vAm5uAm:(10^40)mA 5uSKmՋNh[ňn [2000]>yϑhW[,{209S 5uS:0.5~; 5uAm:0.5~; e:MPE:1.0% 3 NvAm5uS:(1.0^< 15)kV; NvAm5uAm:(0.100^200)mA; e:(10^200)s ')-. 'Y5uAmvAm5u;hVh[ňn [2005]>yϑhlW[,{232S Urel=1.710-4(k=2)% #   (0.0001^0.1) ؚ~5u;KmϑN(ؚ;)h[ňn   [2006]>yϑhW[,{239S* OHM:Urel=210-3(k=2); DCV:Urel=410-3(k=2) % #  %##%& ' OHM:1k^100G; DCV:(1^1000)V USvNAm5uhh[ňn [2008]>yϑhlW[,{242S 220V^240V; 0.1A^60A ~5u;KmՋNh[ňn [2010]>yϑhlW[,{247Sa OHM: 1k^10M:0.2~; 10M^100M:0.5~; 100M^1G1~; 1G^10G:2~; 10G^100G:5~; DCV:Urel=1.2%(k=2) "#*+./0167=>DELMS T%W] ^ OHM:1k^100G; DCV:(1^5000)V NAmpeW[Rshh[ňn [2010]>yϑhlW[,{248S! 0.02~RsVpee"0.8 0.05~RsVpe0.8    (0^600)V; (0^50)A; (45^65)Hz  lo5uAmKmՋNh[ňn [2010]>yϑhlW[,{249S MPE0.1% (1^1000)V; 30A^2A c0W5u;hh[ňn [2015]>yϑhlW[,{272S 0.01^11111.12 V5u;KmՋN0v;Nh[ňn [2015]>yϑhlW[,{286S DC:1^100 c0W[5u;KmՋNh[ňn [2015]>yϑhlW[,{287S DC:0.1m^100; AC:1^60  b_5uAmh!hQňn [2015] >yϑhlW[,{288S* DCI:Urel=410-3(k=2); ACI:Urel=410-3(k=2) % #  %##%& ' (0.1^1000)A peW[Y(uhhQňn [2015]>yϑhlW[,{289S 1DCV:Urel=4.510-6^310-5(k=2); DCI:Urel=(1.5^9)10-5(k=2); ACV:Urel=910-5^610-3(k=2); ACI:Urel=610-4^1.210-3(k=2); OHM:Urel=610-6^1.810-3(k=2) %## # $%&,-2#45 6? @%CH#JKO#QR S\ ]%`e#ghn#pq r{ |%## x DCV:-1000V^-10mV,10mV^1000V; DCI:-20A^-100A,100A^20A; ACV:50mV^1000V(10Hz^1MHz); ACI:100A^50A(60Hz^10kHz); OHM:1^1G %&23@AKL\]eftu USvNAm5uhhQňn [2015]>yϑhlW[,{290S 0.1~h5uh 0.02~h5uhňn   220V; 25mA^100A   Nv5uhhQňn [2015]>yϑhlW[,{291S 0.05~h5uh 0.02~h5uhňn   3(57.7^380)V; 3(50mA^100A) x|c$O:g!hQňn [2016]>yϑhlW[,{303S xS5uAmNvAm MPE1.0 % ^2.0 %   3^10000 A  hb5u;KmՋN!hQňn [2017]>yϑhlW[,{319Sb OHM: 1k^10M:0.2~; 10M^100M:0.5~; 100M^1G:1~; 1G^10G:2~; 10G^100G:5~; DCV: Urel=1.2%(k=2) "#*+0167=>DELMT U%X^ _w{!hQňn [2017]>yϑhlW[,{320S* ;b:0.0001^99.9999; [~:0.0001mS^99.9999mS  ! vAmRAmhV!hQňn [2017]>yϑhlW[,{321S Urel=0.014%(k=2)%  (50^5000)A K{N!hQňn  [2017]>yϑhlW[,{322Sf peW[Y(uh DCV:Urel=(4.6^9.8)10-5 (k=2); DCI:Urel=810-4^1.610-3(k=2); YR!hQhV DCV:Urel=(2.8^4)10-5 (k=2) %# ) *%-2#45;#=> ?DJO P%SXY^#`b c? peW[Y(uh DCV:(0.05^1000)V; DCI:(0.001^3)A; YNT!hQhV DCV:(0.01^1000)V"#(.89 5uAmNahVh[ňn [2017]>yϑhlW[,{323S 0.02S~ (5^2000)A/5A R`[1_x:WhQňn [2018]>yϑhcW[,{017S [ fKmՋb/gxvz@b@ hQňnx:W:U=0.6nT(k=2); hQňnx:WjVX:U=0.6pT(k=2); hQx:_x:W:U=0.3nT(k=2)   & ',34 5< =7 hQňnx:W:20T^100T; hQňnx:WjVX:6pT^3nT; hQx:Wx:W:20T^100T  %,12 10Hz^10kHz1_x:WhQňn  [2018]>yϑhcW[,{018S x:W:U=8.610-4(k=2)   #  ) x:W:110-6T^110-3T (10Hz^10kHz,vQ-N50HzdY) #  #!%' ^c_Y5u5uSh!hQňn [2019]>yϑhlW[,{346S Urel=1.5%,k=2%  vAm5uS:(0.1^20.0)kV  5u`lQ;KmՋN!hQňn  [2019]>yϑhlW[,{347S DCVUrel=(2.8^4)10-5 (k=2) % #  DCV:-1000V^-10mV, 10mV^1000V  b_c0W5u;N!hQňn [2019]>yϑhlW[,{348S (0.01^11111.11) ]ؚSRShV!hQňn [2020]>yϑhlW[,{394S NAm5uS:(1^200)kVNahVN!kSMSwKmՋN!hQňn [2020]>yϑhlW[,{395S& f(-10.000%^10.000%); (-5.0002 ^5.0002 )   vAmؚSRShVhQňn [2022]>yϑhlW[,{431S DCV:(1^200)kV mAm5u[sN!hQňn [2022]>yϑhlW[,{432S[ 5u[s: 20.3MS/m^58MS/m: U=0.10MS/m^0.35MS/m(k=2); 0.58MS/m^20.3MS/m: U=0.01MS/m^0.10MS/m(k=2)   !* +89C DMNW X 1 %IACS^100%IACS 50mT^2.0TR`[x:WhQňn  [2022]>yϑhcW[,{027S V2yb]N1_xN~ϑz Urel=6.510-5(k=2) % #   50mT^2.0T 10Hz^10kHz_1_x:WhQňn  [2022]>yϑhcW[,{028S U=2.610-3B+20pT(k=2)#  # 110-11T^110-6 (10Hz^10kHz,50HzdY)#  # "xwhQňn [2022]>yϑhcW[,{029S Urel=1.510-3(k=2)% #   (0.01^10)Am2 # 0.1mT^50mTR`[x:WhQňn  [2022< ]>yϑhcW[,{030S U=2.410-4B+84nT(k=2)#   0.1mT^50mT h^1_x:WhQňn [2022]>yϑhcW[,{031S U=1.310-3BG+2.4nT/m(k=2) #   (0.01^10)T/m 40Hz^1kHz-Nx:WhQňn  [2022]>yϑhcW[,{032S Urel=1.3%(k=2) % $ 1mT^100mT(40Hz^1kHz); 100mT^1T(47Hz) _dhV!hQňn [2013]>yϑhlW[,{278S g'YAQ]5%b2JNS'Y

eϑ0^360 J e~5u _5uvbNh[ňn [2013]>yϑhW[,{273S  sMPE:1%; E^yϑhcW[,{011S-NV96͑]ƖVlQS,{NNNxvz@b U=0.01^0.09(k=2)  vMO:0^360(20Hz^100kHz) \ Tt-NRshQňn [2018]>yϑhcW[,{012S Urel=5.8%(k=2)% : s:1MHz^1GHz; Rs:(1^75)W(1MHz^80MHz), (1^100)W(80MHz^1GHz)()45  Tt\RshQňn [2018]>yϑhcW[,{014SS  TtNW:0.01GHz^40GHz: Urel=1.2%^2.4%(k=2); Tt2.4mmW:18GHz^40GHz: Urel=3.6%^4.6%(k=2)  %# $*,1289@ A%DIJO P 0.01GHz^40GHz; 0.5mW^10mW SSpehQňn [2018]>yϑhcW[,{015S 8h[[a:NQ~RgNe: 5uS{lk:Urel=4%^5%(k=2); pQϑ:Urel=(0.30^0.50)(k=2); Ovy:U=1.0^1.5(k=2); h[[a:NTySSpehVNe: S\|pe:Urel=5%^8%(k=2); ceQ_c:U=(0.33^0.57)dB(k=2); Ovy:U=1.1^2.6(k=2);   % $'( )%,239 :?CD EJKP QV]^ceij k%nqru v{     's:(0.05^40)GHz; h[[a:NQ~RgNe: 5uS{lk:1.10^2.00; pQϑ:2.4mm; cS:0dB^40dB; NWcS:0dB^50dB; Ovy:-180^180; h[[a:NTySSpehVNe: S\|pe:0^1; ceQ_c:0dB^40dB; Ovy:-180^180 #()/2;=ABILPQW[abhopuw{}~Ɩb5uؚ)nR`S|~h[ňn [2018]>yϑhcW[,{016S-NV96ƖV gPlQS,{N0]Nxvz@bR )n^:U=0.13!(k=2); NGSe:Urel=3%(k=2); vAm5uS:Urel=1.310-4(k=2); s:Urel=6.010-5(k=2)   % $() *%-4#67 8=?@ A%DK#7 )n^:[)n^200!; NGSe:350ps; vAm5uS:10mV^350V; s:10Hz^2.5GHz "#)+01_5uV:gh[ňn [2019]>yϑhlW[,{372S/ el5uS:MEP1%; hTg:MEP1%; ck&_l5uS:MEP1%; s:MEP1% &(= el5uS:0.5mV^5mV; hTg:0.05s^10s; ck&_l5uS:0.5mV^5mV; s:0.1Hz^150Hz #)*/178 peW[_5uV:gh[ňn [2019]>yϑhlW[,{373Sp s:MPE:0.5%; _s:MPE:1%; E^TU5 s:(0.01^100)Hz; _sV:(20^300)!k/R; E^yϑhlW[,{374SU _sMPE1% |T8TW@x;bMPE3%@'lqT^MPE(100~75)%, 1% sMPE1% eR@SMPE0.1 kPa (1 mmHg)  !"0367;@CD] !_s:(30^300)!k/R; |T8T:(10^80)!k/R; @'lqT^:(35^100)%; s:(30^250)!k/R; eR@S:(0^40)kPa[(0^300)mmHg]   $()0267;<=>@DGHQR R`_5uV:gh[ňn [2020]lϑhlW[,{384S s:MPE:1%; E^yϑhcW[,{019S  NvAm5uS:Urel=1.010-3(k=2); vAm5uAm:Urel=1.010-3(k=2); NGSe:U=10ps^0.42ns(k=2); qROSSOP]:U=70ps(k=2); QOSs:Urel=1.510-6(k=2); lb_SuhVlb_E^^n: 200Hz^20kHz:Urel=1.510-3(k=2), 20kHz^10MHz:Urel=2.510-2(k=2); lb_peW[SNlb_sKmϑ:Urel=2.510-5(k=2); lb_peW[SNlb_E^^Kmϑ:Urel=2.510-2(k=2) % #  %")#+, -267 8=>E FKTU V\ ]bhi j%mt#vw x} %#  %#  %#  %#  !vAm5uS:100mV^1000V; vAm5uAm:300nA^2A; NGSe:100ps^10ns; qROSSOP]:<2ns; QOSs:10Hz^100MHz; lb_SuhVlb_E^^n:0.1V^10V(200Hz^10MHz); lb_peW[SNlb_sKmϑ:1kHz^10MHz; lb_peW[SNlb_E^^Kmϑ:0.1V^10V(1kHz^10MHz) !%+,2;BHMNVafgpqy 5u[hVؚ)nS|~!hQňn [2022]>yϑhcW[,{020SA )n^:U=0.12!(k=2); vAm5uS:Urel=3.210-4(k=2); vAm5uAm:Urel=8.010-4(k=2)   %!##$ %*./ 0%3:#<= >+ )n^:[)n^300!; vAm5uS:0.1V^300V; vAm5uAm:20A^100mA  %& SOCƖb5uKmՋ|~h[ňn [2022]>yϑhcW[,{021S 8vAm5uS: (10mV^1V):Urel=1.510-4(k=2); (1V^1000V):Urel=4.610-5(k=2) vAm5uAm:Urel=2.010-4(k=2); NGS/ NMe:U=9ps^450ps(k=2); s:Urel=2.410-8(k=2); NAm5uSE^^:Urel=2.410-2(k=2)  %# )*1 2%5<#>? @DHI J%MT#VW X]_`de fjkq rwyz {%~#  %# X vAm5uS:(10mV^1000V); vAm5uAm:(1A^10A); NGS/ NMe:100ps^10ns; s:1kHz^1.3GHz;<  NAm5uSE^^:200mV^5V %'(,239;@AIOUVpeW[Ɩb5uKmՋ|~h[ňn [2022]>yϑhcW[,{022S{ (vAm5uS:Urel=1.010-3(k=2); vAm5uAm:Urel=1.010-3(k=2); NGSe:U=0.3ns^6ns(k=2); qROSSOP]:U=0.15ns(k=2); QOSs:Urel=1.510-6(k=2) % #  %")#+, -267 8>?C DIRS T\ ]bhi j%mt#vw xU vAm5uS:100mV^100V; vAm5uAm:300nA^2A; NGSe:3.6ns^200ns; qROSSOP]:<2ns; QOSs:100Hz^250MHz  $*+2;BHNO!jbƖb5uKmՋ|~h[ňn [2022]>yϑhcW[,{023S< gvAm5uS:Urel=4.610-4(k=2); vAm5uAm:Urel=2.310-4(k=2); lb_SuhVQs:Urel=3.410-6(k=2); lb_SuhVQE^^:Urel=3.410-2(k=2); lb_RghVsKmϑ:Urel=2.410-5(k=2); lb_RghVE^^Kmϑ:Urel=3.410-2(k=2); \!jWWRsQ:U=0.32dB(k=2); \!jWWRsKmϑ:U=0.6dB(k=2); \!jWWsQ:Urel=2.410-8(k=2); \!jWWsKmϑ:Urel=1.210-6(k=2); \!jWWSSpe:S11:U=0.05(k=2),S12:U=0.4dB(k=2) % #  %")#+, -3<= >%AH#JK LQZ[ \%_f#hi jn#oxy z%}# # %# #     %#  % #  #    !' (, -0 18 9 5vAm5uS:10mV^1000V; vAm5uAm:1A^30A; lb_SuhVQs:1kHz^10MHz; lb_SuhVQE^^:0.1V^10V(1kHz^10MHz); lb_RghVsKmϑ:1kHz^10MHz; lb_RghVE^^Kmϑ:0.1V^10V(1kHz^10MHz); \!jWWRsQ:-50dBm^4dBm; \!jWWRsKmϑ:-50dBm^4dBm; \!jWWsQ:100MHz^6GHz; \!jWWsKmϑ:100MHz^6GHz; \!jWWSSpe:50&!025&!020dB050dB (-.5>CDLMU^cdktyz  5ugꁨRKmՋ|~!hQňn [2022]>yϑhcW[,{024S 5uSqR0.5%^0.1% 5uAmqR0.5%^0.1% sKmϑ110-7^310-8 RsKmϑ0.6dB(0dBm) ,156:;W\`#bcg#ijX vAm5uSqR:100mV^300V; vAm5uAmqR:100mA^1A; sKmϑ:250kHz^6GHz; RsKmϑ: -60dBm^+10dBm (250kHz^20GHz)  $(/06:BCQR Ɩb5uhQ7hGr[yϑhcW[,{025S, vAm5uS:Urel=510-4(k=2); vAm5uAm:Urel=210-3(k=2) % #  % %#'( ) vAm5uS:0.1V^7V; vAm5uAm:100A^20mA Ɩb5upKmՋ|~!hQňn [2022]>yϑhcW[,{026SA )n^:U=0.52!(k=2); vAm5uS:Urel=1.010-3(k=2); vAm5uAm:Urel=5.210-3(k=2)   %!##$ %*./ 0%3:#<= >, )n^:(15^150)!; vAm5uS:0.5V^24V; vAm5uAm:10A^200mA!&' _lOSSuhVh[ňn [2022]>yϑhcW[,{035S >s:Urel=5.810-6^3.310-9(k=2); ~[5us^:U=0.20dB^0.32dB(k=2); v[5us^:U=0.09dB^0.96dB(k=2); E^^:Urel=0.6%^30%(k=2); OP:Urel=1.2%^9.8%(k=2); vvOP:Urel=1.2%^3.7%(k=2); 1~^:U=1dB^3dB(k=2) %##  $% &-.5 6;?@ AHIP QVYZ [%^cdh inrs t%w|}  %   l s:100kHz^40GHz; ~[5us^:-20dB^+30dBm; v[5us^:0^-110dB; E^^:5%^d"99%; OP:0^400kHz; vvOP:0^400rad; 1~^:(0^80)dBc $(*+369:@DFGOSUV^bef [&^5uShQňn [2022]>yϑhcW[,{036S3 NO5uS:Urel=0.01%^0.3%(k=2); ؚ5uS:Urel=0.8%^1.8%(k=2) %   !%$)*/ 06 NO5uS: 10mV^100V(10Hz^1MHz); ؚ5uS: 0.3V^1.5V(10Hz^2GHz)  &'01 NOSpehQňn [2022]>yϑhcW[,{037S 3NAm5uSKmϑ:Urel=2.810-4^1.410-3(k=2); NAm5uSQ:Urel=610-5^5.610-4(k=2); vAm5uSQ:Urel=4.510-6^7.810-5(k=2); 1Yw:Urel=14%(k=2); s:Urel=1.210-7(k=2) % ## $*+ ,%/4#67=#?@ AFLM N%QX#Z[a#cd ejlm n%qv w|~ %#  NAm5uSKmϑ: 10mV^1000V(10Hz^100kHz); NAm5uSQ: 10mV^750V(10Hz^100kHz); vAm5uSQ: 10mV^1000V; 1Yw: 0.01%^30%(20Hz^100kHz); s: 0.1Hz^200MHz !'-.78AGMNUW^_ghqsz{es SP[shQňn [2018]>yϑhcW[,{013S fkIl-NS5uP[ƖV gPlQS U=8.410-13(k=2)#   10MHz05MHz01MHz0100kHz  S5uR^h[ňne0s [2019]>yϑhlW[,{366S[ Sp160Hz: Urel=1.0 %(k=2); 10 Hz^2000 Hz: Urel=2.0 %(k=2); 2000 Hz^5000 Hz:Urel=3.0 %(k=2) %  !") ,%/6 7; <CDK M%PW X! s10^5000 Hz R^0.1^100 m/s2  # R`OSRgNh[ňn [2020]>yϑhlW[,{392S* sUrel=0.01 % k=2 1E^yϑhW[,{192S) SIQ:_^U=4.5%(k=2) IQtOPyyϑhlW[,{337S Urel=3.2% k=2%  3< .0^296.0 cdlx-1m-2 ## of^hKmN!hQňn [2019]>yϑhlW[,{365S gq^N~5uP[yhR^yϑhlW[,{387S gq^MPE8% r)nMPE100K " gq^0.1^20000 lx r)n2300^10000 K  ! +}Y\gq^hQňn [2022]>yϑhcW[,{041S Ğw^ϑh[xvz@b Urel=15% k=2% n UVA0UV365lkўIQWؚS^lop0LED365+}YIQn 0.1^4000 W/cm2 UVBlkV{+}YgIQop 0.1^390 W/cm2UVClkV{NOSgIQop 0.1^400 W/cm2 !$%)*/#04ADEHIN#OPS`cdghm#5uy\ ]\O~BRϑhQňn [1987]>yϑhW[,{166S  Urel=8% (k=2)%  (0.1^1000)Sv/h ;S(uʋe{:geB\Ddq_ňn(CT) x\~\nh[ňn  [2001]>yϑhW[,{214S  Urel=4% (k=2)%  (0.1^1000)mGy pSOcKmhV1N!hQňn [2013]>yϑhW[,{268S Urel=10% (k=2)%  ;m^(10^1104)Bq #  ;S(uX\nh[ňn [2016]>yϑhW[,{302S& ʋe4ls^BRϑUrel=5%(k=2)lu4ls^BRϑUrel=3%(k=2) %   %" #) ʋe4ls^BRϑ0.1^100 mGy lu4ls^BRϑ0.1^1000 cGy  !%& ;S(upeW[Ddq_CR0DR |~X\~\nh[ňn   [2019]>yϑhlW[,{371S, zzlkʑRUrel 3.0%k2zzRRU = 0.6~[/cmk=2 %    #%() *' zzlkʑR(0.1^100)mGy zzRR(6^50)Lp/cm & X\~c$O:gh[ňn   [2019]>yϑhlW[,{377S zzlkʑRUrel=5%k2 %   zzlkʑR(0.1^100)cGy  ;S(usNzX\~\nh[ňn [2020]>yϑhlW[,{380S( zzlkʑRUrel 3.0%k2 {5uSU = 0.3kVk=2 %    $% &$ zzlkʑR(0.01^100)mGy {5uS(20^40)kV  ;S(uʋehQofYryX\~\nh[ňn  [2020]>yϑhlW[,{381S5 zzlkʑRsUrel3.0%k2 {5uSU = 0.8%k=2 zzRRMPE10% %   "# $& (-01> zzlkʑRs60Gy/min^1Gy/min {5uS(40^150) kV zzRR(16^30)Lp/cm !"+145 X\~]N[ebP|~!hQňn [2020]>yϑhlW[,{382S; zzlkʑRUrel5.0%k2 zzlkʑRsUrel8%k2VPRRU0.01mmk2 %   %!"$% &'(/ 0178 9:B zzlkʑR(0.1^100)cGy o\~zzlkʑRs(0.01^99)Sv/hVPRR0.6^5.0 Lp/mm $%-589<=;S(u5uP[RhV\nh[ňn [2021]>yϑhlW[,{408S Urel 1.5%k2%  zzlkʑRs(0.01^10) Gy/min  ;S(uʋeX\n{5uSN!hQňn [2021]ϑhlW[,{420S MPE1.0% (40^150)kVtS pH(x^)h[ňn [1987]>yϑhW[,{169S ; x^h[N0.0006~ N~pHhQir(U=0.01pHk=3 lyP[hQnmUrel=0.46%k=2    !#, -%067 8:O x^h[N(-2000^+2000)mV (0^14)pHN~pHhQir(4.0006.8609.18 pH25! lShQir(99.97%  #%+/0459:<=@I el|^h[ňn [2005]>yϑhW[,{233S  Urel= (0.15^0.6)% k = 2%   1^1106 mPa.s #  pHx^ h[Nh[ňn [2006]>yϑhW[,{236S Urel=2-3 10-5 k=2%  #  pHyϑhW[,{260S \ hQUSRce|P[ 0.4m U=6nm k=20.5m U=7nm k=20.6m U=9nm k=2 \W|P[pehV SRV[~~vk[ _na~g͑ Y'`d"5%  ! "&' (*+2 378 9<DEY |_(0.1~10.0)m vhRgNh[ňn [2010]>yϑhW[,{245S lU=1.0 nm k=2 8TIQ^U=0.010 k=2     l(350^900)nm 8TIQ^(0.09^1.75) JSꁨRuSRgNh[ňn [2010]>yϑhW[,{244S# lU0.5nm k2 8TIQ^Urel=2% k =2   %  l200^700 nm 8TIQ^0.1~1.0 Abs  i`lϞ^h[ňn [2019]>yϑhlW[,{375S MPE: 0.1s KmϑV(0^2000)s AmQog_Ϟ^h[ňn [2019]>yϑhlW[,{376S& Ϟ^Urel=(0.20^0.64)% k=2eMPE: 0.1s %  ! Ϟ^ (1^100000)mm2/se (0^2000)s# @mgňn!hQňn [2020]>yϑhlW[,{383ST 5u[sMPE:0.1mS/cm)n^ MPE:0.1 !SRMPE:0.27 kPa/0.67 kPapH?ACDEGHIMNOST oirnQ^N!hQňn [2020]>yϑhlW[,{386SL )n^U=0.10!k=2 l0.1~4ls^^0Wv^MPE:0.1 Tt^0FdRE^^MPE:0.1mmm^ MPE:0.1mm   )3=AL )n^10^50 !l20^400 r/min4ls^^0Wv^0^180  Tt^0FdRE^^0^3 mmm^0^100 mm  &'(+,-./9:;<=?DEFIJ ЏRϞ^Km[hV!hQňn [2020]>yϑhlW[,{396S, )n^U=0.050!k=2 Ϟ^Urel=0.10^0.50 %k=2  " )n^20^100 ! Ϟ^0.3^30000 mm2/s 2u<(lKm[N!hQňn [2021]>yϑhlW[,{405S$ 4l-N2uUrel=3.0% k=24l-N(lUrel=2.4% k=2 %  % ! "* 4l-N2u(0.01^0.40) mg/L4l-N(l(0.01^2.00) mg/L   glf.l'lSirNOX hKmN!hQňn  [2021]ϑhW[,{413S 8 CO2Urel=1.2%(k=2)NOUrel=1.1%(k=2)NO2Urel=2.1%(k=2)% % % !$%'%() *%-3 47G #CO20^18.00 10-2NO0^4000 10-6NO20^1000 10-6NO2-NOlSs0^100%% ##$&%')*+/03#568%9<@ABFJ1 NKrPO2 ZF ?Wad   <E%ŹC[ .=@  dMbP?_*+%;&?'?(?)?" d??& U} A}  A} A} 3A} @#A} .A}  (A} @ A}  AE H@;w;v;v v v ; ; ;;;vv;;;;;;vv;;;v CDDDDDDD E E E E E E E E F GGGGGGQ~ H?  J  R  ~ K @~ H@  J  R  ~ K @~ H@  J  R  ~ K @~ H@  J  R  ~ K @~ H@  J  R  ~ K @~ H@  J  R ! "~ K @~ H@ # J $ R % &~ K @~ H @ ' J ( R ) *~ K @~ H"@ + J , R - .~ K @~ H$@ / J 0 R 1 2~ K @~ H&@ 3 J 4 R 5 6~ K @~ H(@ 7 J 8 R 9 :~ K @~ H*@ ; J < R = >~ K @~ H,@ ? J @ R A B~ K @~ H.@ C J D R E F~ K @~ H0@ G J H R I J~ K @~ H1@ K J L R M N~ K@~ H2@ O J P R Q R~ K,@~ H3@ S J T I U V~ K8@~ H4@ W J X I Y Z~ K8@~ H5@ [ J \ R 5 ]~ K<@~ H6@ ^ J _ R U` a~ K<@~ H7@ b J c R d e~ KD@~ H8@ f J g R Ih Vi~ KL@~ H9@ j M k W Xl Wm~ Nh@~ H:@ n M o W Yp Zm~ Nh@~ H;@ q M r W Ls Wt~ Nh@~ H<@ u M v W w x~ Nx@~ H=@ y M z W { |~ N@Dl&p&pppppppppppppppppppppppppppp ;!v"v#;$%;&;'v(v@)@*v@+v@,b@-@.@/v0v1v2 3v4v5v6v7v8v@9v:v;v@<v@=;>v?v~ H>@ } M ~ W  ~ N@~ !H?@ ! !M ! !W !L !L~ !N@~ "H@@ " "M " "W " "~ "N@~ #H@@ # #M # #W #N #~ #N@~ $HA@ $ $M $ $W $L $~ $N@~ %HA@ % %M % %W % %~ %N@~ &HB@ & &M & &W & &~ &N@~ 'HB@ ' 'M ' 'W ' '~ 'N@~ (HC@ ( (M ( ([ (L (L~ (O@~ )HC@ )M )M )M )M )L )L~ )N@~ *HD@ *M *M *M *M *\ *\~ *N@~ +HD@ +M +M +M +M +N +L~ +N@~ ,HE@ ,M ,M ,M ,M ,L ,N~ ,N@~ -HE@ -M -M -M -M -L -L~ -N@~ .HF@ .M .M .M .M .L .L~ .N@~ /HF@ / /M / /W / /~ /N@~ 0HG@ 0 0M 0 0W 0 0~ 0N@~ 1HG@ 1 1M 1 1W 1 1~ 1N@~ 2HH@ 2 2M 2 2W 2 2~ 2N@~ 3HH@ 3 3M 3 3W 3 3~ 3N@~ 4HI@ 4 4M 4 4W 4 4~ 4N@~ 5HI@ 5 5M 5 5W 5 5~ 5N@~ 6HJ@ 6 6M 6 6W 65 6~ 6N@~ 7HJ@ 7 7M 7 7W 75 7~ 7N@~ 8HK@ 8 8M 8 8L 8 8~ 8N@~ 9HK@ 9 9M 9N 9W 9\ 9N~ 9N@~ :HL@ :M :M :P :M :P :P~ :P@~ ;HL@ ;M ;M ;P ;M ;] ;P~ ;P@~ <HM@ <M <M <P <M <P <P~ <P@~ =HM@ =L =M =N =M =^ =_~ =P@~ >HN@ >L >M >P >M >_ >_~ >P@~ ?HN@ ?L ?M ?P ?M ?_ ?`~ ?a@Dlppppppppppppppppppppppppppppppp@vABvCDvEv@Fv@GHvIwJwKwL;MwN;OvPwQ;RvSvT;UvVvW;X;YvAZv[\;];^v_vA~ @HO@ @L @M @P @M @_ @_~ @a@~ AHO@ AL AM AP AM Ac AX~ Aa@~ BHP@ BL BM BP BM BX BX~ Ba@~ CH@P@ CL CM CP CM CM CX~ Ca@~ DHP@ DL DM DP DM DX DX~ Da@~ EHP@ EM  EM EP  EM EP  EM ~ EP@~ FHQ@ FM  FM FP FM FM FP~ FP@ GFGGGGGGGQ~ Hb@Q@ H HM H Hd H H~ HO @~ IbQ@ I IM I Id IL I~ IO @~ JbQ@ J JM J Jd JL J~ JO @~ KbR@ K KM K Kd KL  K!~ KO @~ Lb@R@ L" LM L# Ld L L$~ LO @~ MbR@ M% MM M& Md M' M(~ MO @~ NbR@ N) NM N* Nd N+ N,~ NO @~ ObS@ O- OM O. 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